微纳制造技术自出现以来已经为众多领域带来巨大突破，它对推动国家工业和经济的发展具有重大意义。表面微纳米结构制造是微电子、超浸润、光子器件、生物芯片等前沿应用领域的核心内容和重要基础。但传统的微纳制造方法依赖于昂贵复杂的精密设备，存在加工速度慢、制备面积小、成本高等问题。近年来，各种胶体材料被开发出来，通过胶体自组装诱导其形成特定的微纳米结构，有助于弥补传统制造方法的不足。现有研究已经在小尺寸上证明了胶体颗粒自组装在表面微纳米结构制造中的巨大潜力，然而这些方法大多速度慢、尺寸小，难以适用于工业化过程。本文基于界面张力梯度诱导的胶体颗粒自组装方法研究，有效地实现了自组装微结构的高效、大面积制造，并在此基础上通过增材和减材的手段提出了图案化微结构以及衍生微结构的高效制造方法，证明了其应用潜力。首先，提出了张力梯度诱导的胶体颗粒液气界面高效自组装方法。探明了液气界面张力梯度构建方式及相关参数对自组装效果的影响规律。揭示了张力梯度诱导自组装策略能够提升胶体颗粒自组装效率同时增强自组装质量的作用机理。实现了针对多种不同尺寸、材料、形状的胶体颗粒单层有序自组装结构的快速大面积制备，自组装时间大幅缩短至秒级，完整的自组装结构制造面积突破至1000 cm2。其次，提出了张力梯度诱导的胶体颗粒三相界面高效自组装方法。探明了弯液面张力梯度构建参数对自组装效果的影响规律，揭示了其作用机理，大幅提升自组装效率至mm/s数量级。实现了针对多种不同尺寸、材料、形状的胶体颗粒密排多层自组装结构的快速大面积（约600 cm2）制备。证明了基于该方法制备的胶体颗粒自组装微结构涂层在超疏水/超亲油表面、高效油水分离等领域中的应用潜力。随后，提出了基于胶体颗粒自组装结构与转移压印相结合的胶体颗粒微图案高效增材制造方法。探明了粘附力差异控制、转移印刷体系设计、表面微结构设计等对胶体颗粒微图案结构制备效果的影响规律，实现了单颗粒精度的胶体颗粒微图案制备控制，进而实现了碳基/金属基高精度（最小线宽2 μm）微电路制造，并证明了其在微电子中的应用潜力。最后，提出了基于胶体颗粒自组装模板与刻蚀相结合的大面积表面纳米针阵列结构高效减材制造方法，并将纳米针与微流控复合构建了振动辅助纳米针/微流体系统，实现了基于纳米针膜穿孔的高效（递送率超90%）、高活率（约80%）、高通量（mL/min量级）胞内递送，证明了其在基因编辑及免疫治疗中的应用潜力。

Since the emergence of micro-nano manufacturing technology, it has brought great breakthroughs in many important fields, and it is of great significance to promoting the development of national industry and economy. Fabrication of surface micro-nanostructures is the core content and important foundation of cutting-edge application fields such as microelectronics, super wetting, photonic devices, and biochips. However, the traditional micro-nano manufacturing method is highly dependent on expensive and complex precision equipment, which has problems such as slow preparation speed, small preparation area, and high cost. In recent years, various colloidal materials have been developed, which can be induced to form specific micro-nanostructures through colloidal self-assembly, which helps to make up for the shortcomings of traditional manufacturing methods. Existing studies have demonstrated the great potential of colloidal particle self-assembly in the fabrication of surface micro-nanostructures on a small scale. However, most of these methods are slow in speed and small in size, making them difficult to apply to industrial processes. In this research, based on the colloidal particle self-assembly method induced by the interfacial tension gradient, the efficient and large-area fabrication of self-assembly microstructures has been effectively realized. On this basis, the efficient fabrication methods of patterned microstructures and derivative microstructures are further proposed by means of additive and subtractive manufacturing methods, and the application potential is proved.Firstly, a tension gradient-induced liquid-air interface colloidal particle efficient self-assembly method was proposed. The influence of the construction method of the liquid-gas interfacial tension gradient and related parameters on the self-assembly effect was studied. The mechanism by which the tension gradient-induced self-assembly strategy can improve the colloidal particle self-assembly efficiency and enhance the self-assembly quality was revealed. The rapid and large-area preparation of colloidal particle single-layer ordered self-assembly structures of various sizes, materials, and shapes has been realized. The self-assembly time has been greatly shortened to the second level, and the complete self-assembly structure manufacturing area has broken through to 1000 cm2.Secondly, a tension gradient-induced three-phase interface colloidal particle efficient self-assembly method was proposed. The influence of the meniscus tension gradient construction parameters on the self-assembly effect has been studied, the mechanism of the self-assembly has been revealed, and the self-assembly efficiency has been greatly improved to the order of mm/s. The rapid and large-area (about 600 cm2) preparation of colloidal particle close-packed multilayer self-assembly structures of various sizes, materials, and shapes has been realized. The application potential of the colloidal particle self-assembly microstructure coatings based on this method in the fields of superhydrophobic/superoleophilic surfaces and high-efficiency oil-water separation was proved.Besides, an efficient additive manufacturing method of colloidal particle micropatterns based on the combination of colloidal particle self-assembly structure and transfer printing was proposed. The effects of adhesion difference control, transfer printing system design, and surface microstructure design on the preparation effect of colloidal particle micropattern structures have been studied. The preparation control of colloidal particle micropattern with single particle precision has been realized, and then the high-precision (minimum line width 2 μm) microcircuits composed of carbon colloidal particles and metal colloidal particles have been fabricated, and their application potential in patterned microelectronics and flexible microelectronics has been proved.Finally, an efficient subtractive manufacturing method for large-area surface nanoneedle array structures based on the combination of colloidal particle self-assembly templates and etching was proposed. The vibration-assisted nanoneedle/microfluidic system was constructed by combining nanoneedles with microfluidics, which achieved high efficiency (intracellular delivery rate over 90%), high viability (about 80%), and high throughput (~mL/min) intracellular delivery, and its application potential in gene editing and immunotherapy has been proven.