由薄膜结构组成的软体机器人系统由于其轻质、微型化等优势，被广泛应用于生物医学、环境探测等领域，正越来越受到研究者的关注。其中，三维细微观结构在其中起到关键的作用。目前，薄膜机器人的制备方法在尺度、材料、几何构型等方面存在一定局限。本文基于力学引导的屈曲组装方法，建立力、电、热多物理场驱动下三维结构的组装与重构方法。进一步深入分析多物理场驱动下屈曲三维结构的变形行为，研制了一种微型软体攀爬机器人和三维柔性可重构电容器。本文的主要研究内容如下：（1）提出了一种基于介电弹性体的力电耦合组装方法。基于理论模型和有限元计算，分析了不同电极图案排布（圆形、圆环形、扇形、圆形阵列等）、应变限制纤维排布、加载时序下基底的应变分布和加载模式，实现了广尺度范围、多材料种类三维结构的直接、快速、可逆组装与重构。此外，将组装平台与软封装材料异质集成，设计了一种可防电击穿的人造肌肉。（2）探明了静电力对屈曲三维结构的几类典型作用形式，建立了针对屈曲三维结构的力电耦合理论模型和仿真计算方法。揭示了关键几何参数、材料参数、加载条件对结构突跳、位移和曲率分布的影响规律，并对静电吸附作用下基底/薄膜系统的等效界面能参数进行标定。设计了一系列三维结构，实现了三维结构的快速、可逆重构，展示了该组装方法的广泛适用性。（3）基于“PI/LIG/硅胶”和“LIG-LCE”的复合结构体系，提出了一种小尺度下独立三维结构的热驱动组装与重构方法，深入探究了关键几何参数、材料参数对结构热响应变形和驱动力的影响规律，揭示了其刚度可变和形状可恢复的特征。结果表明，该方法可实现小尺度下可定制的“二维-三维”和“三维-三维”结构重构。（4）开展了多物理场驱动下可重构三维结构在软体机器人系统中的应用研究。受浮游生物启发，基于“LIG-LCE”复合结构体系的力热耦合组装方法，开发小尺度下可定制的三维驱动器。设计并制备微型软体攀爬机器人，可同时实现其在各种形貌墙面的攀爬和不同墙面间的转换，提高了微型软体攀爬机器人在非结构化环境中的运动性能。基于介电弹性体组装平台，设计并制备了一种三维柔性可重构电容器，展示了力电耦合组装方法在柔性可重构电学器件中的潜在应用。

The soft robotic systems composed of thin-film-based structures are widely used in the fields of biomedicine and environmental detection, and are attracting rising attentions from researchers, due to their advantages of light weight and miniaturization, in which the three-dimensional (3D) meso/microstructures play a key role. Currently, the fabrication methods of the thin-film-based robot are limited in terms of scale, material, and geometric configuration. In this dissertation, methods for assembling and morphing 3D structures driven by electro-thermo-mechanical fields are established, based on the mechanically-guided assembly approach. Furthermore, with the deformation behaviors of the buckled 3D structures driven by multi-physics fields deeply analyzed, a soft climbing microrobot and a 3D flexible reconfigurable capacitor are developed. The main contents of this dissertation include:(1) An assembly method based on dielectric elastomer (DE) driven by electro-mechanical field is proposed. The strain distribution and loading mode of substrates are analyzed, considering the arrangements of electrode patterns (i.e., circular, annular, sectorial and circular array patterns) and strain-limiting fibers, and loading sequence, based on the theoretical model and FEA calculation. As a result, direct, rapid, and reversible assembly and reconfiguration of 3D structures with a wide range of scales and multiple materials, have been achieved. Additionally, the assembly platform is heterogeneously integrated with soft encapsulation materials to design an artificial muscle that is resistant to electrical breakdown.(2) Several typical forms for applying electrostatic forces on buckled 3D structures are identified, and a theoretical model and a simulation method of electro-mechanical coupling for buckled 3D structures are developed. The effect laws of key geometric parameters, material parameters and loading conditions on the snap through, displacement and curvature of structures are revealed. Equivalent interfacial energy parameters of the substrate/film system controlled by electroadhesion are calibrated. Finally, a series of 3D structures which can morph rapidly and reversibly are designed, demonstrating the broad applicability of this assembly approach. (3) A thermally-controlled method for assembly and reconfiguration of freestanding 3D structures at small scales is proposed, based on the composite system comprised of ‘PI/LIG/silicone’ or ‘LIG-LCE’. The effect of key geometric and material parameters on the thermally responsive deformation and actuation force of the structure is deeply explored. Also, the features of stiffness-varying and shape-recovery of the 3D structure are revealed. The results show that the thermally-controlled 3D assembly method can achieve customized ‘2D-to-3D’ and ‘3D-to-3D’ shape morphing at small scales. (4) Researches on applications of reconfigurable 3D structures in soft robotic systems, driven by multiphysics fields are carried out. Inspired by plankton, a customized 3D actuator at small scales is developed based on the coupled thermo-mechanical assembly method of ‘LIG-LCE’ composite system. A soft climbing microrobot, which can both climb on walls with various shapes and transition between different walls, is designed and fabricated, improving the locomotion performance of the soft climbing microrobot in unstructured environments. A 3D flexible, reconfigurable capacitor is designed and fabricated based on DE assembly platform, demonstrating the potential application of the coupled electro-mechanical assembly method in flexible reconfigurable electronics.