摩擦磨损与人类的生产生活有着密切的联系。科学家在不断探索减小和控制摩擦的方法，目前已在常规润滑乃至超滑研究中取得了诸多进展。随着机电系统向微型化发展，微纳界面的摩擦磨损成为限制微机电系统实现精准、复杂运动的主要困难，而常规的润滑手段和很多超滑方案却难以解决这一问题。对此，振动调控摩擦因其适应性强、摩擦抑制能力突出而成为微纳界面摩擦问题的潜在解决方案。然而，由于实验仪器难以探知埋入界面的信息，振动调控摩擦的微观机理还未得到充分研究。本文的主要工作是对振动激励抑制原子粘滑摩擦的机理进行探究，探索通过振动控制摩擦的方法。 本文结合PT原子摩擦模型、分子模拟和原子摩擦实验证明了横向（X）、纵向（Y）和正向（Z）振动均能有效抑制原子粘滑摩擦，降低磨损。振动激励摩擦抑制能力源自粘滑推动效应，而不同方向单轴振动激发这一效应的机理并不相同。横向振动提升了针尖跨过势垒的能力，纵向振动优化了滑动路径，正向振动则提供一个低能通道辅助针尖跨过势垒。实验结果验证了模拟关于振动激励摩擦抑制能力的研究，并发现纵向振动在相同条件下具有最强的磨损抑制能力。 本文对模拟模型中的多种参数影响特性和机理进行了研究，包括阻尼、弹簧刚度、温度、速度、惯性等，并分析了单轴振动摩擦抑制能力的各向异性。此外，本文还以原子台阶为典型特征分析了振动激励在非理想界面上的摩擦抑制能力。本文开展了不同方向耦合振动调控摩擦机理的模拟和实验研究，发现相同频率的X-Z双向耦合振动具有最优的摩擦抑制能力和显著的摩擦调控能力，仅通过改变相位即可实现滑动状态在粘滑和超滑之间转变。这种摩擦调控能力源自X-Z双向耦合振动对势能的调制。在不同相位下，调制的势能对针尖滑移产生的阻力有明显的差异，并进一步通过改变粘滑推动效应的强度和比例实现摩擦调控。此外，对振动能量的研究显示，摩擦抑制能力在两方向振动能量相当时最强。 最后，为了解决当前实验条件在激励、检测和降噪等方面的不足，本文介绍了我们自行设计搭建的高真空微纳摩擦测试系统。该系统具有多功能的特点，可实现样品台扫描和探针扫描，压电激励及光热激励，并可集成激光多普勒测振系统进行原位实时振动测量。该系统有助于对振动调控摩擦的影响因素进行进一步深入研究，还为微纳摩擦能量耗散研究提供了研究平台。

Friction and wear are closely related to industrial production and daily life. Scientists have been constantly exploring ways to reduce and control friction. And great progress has been made in the research of conventional lubrication and superlubricity. With the development of the electromechanical system to miniaturization, the friction and wear of the micro-nano interface have become the main factor limiting the precise and complex movement of MEMS. And this problem is hard to solve by conventional lubrication methods and many superlubricity strategies. Vibration-induced superlubricity is one of the potential solutions to the friction problem of micro-nano interfaces with its strong friction reduction ability and universal applicability. However, the mechanism of this method has not been fully explored because it is difficult for experimental instruments to detect the information of buried interfaces. The main work of this paper is to explore the mechanism of friction reduction and methods for controlling friction by vibrational excitation. This paper combines the PT model, MD simulation, and experiments to confirm that lateral, vertical, and normal vibrational excitation can effectively reduce friction and wear. Although the pushing effect of stick-slip represents the direct source of the friction reduction ability, the ways to excite this effect vary on different axes. The lateral vibrational excitation improves the ability of the tip to cross the potential barrier. The vertical vibrational excitation optimizes the sliding path. The normal vibrational excitation provides a low-energy channel to assist the tip in crossing the potential barrier. The experimental results verify the simulation research on the friction reduction ability of vibrational excitation. The findings also show that vibrational excitation in all three axes can reduce the wear of the tip, of which vertical vibrational excitation displays the best wear reduction effect. Furthermore, this paper explores the influence characteristics and mechanism of various parameters in the simulation model, including damping, spring stiffness, temperature, velocity, and inertia. The anisotropy of the friction reduction ability under uniaxial vibrational excitation is analyzed by changing the sliding direction. In addition, we also examines the friction reduction ability of vibrational excitation via atomic steps, which are considered as the typical feature of non-ideal interfaces. In the characterization of the friction reduction ability of a variety of coupled vibrations in different directions, it is found that X-Z coupled excitation at the same frequency facilitates strong friction reduction and significant friction regulation. The sliding state can be changed between stick-slip and superlubricity only by changing the phase difference. This friction control ability results from the modulated potential excited by X-Z coupled excitation. Under different phases, the modulated potential may hinder or assist the tip crossing the potential barrier, further changing the strength and proportion of the pushing effect of stick-slip. It also shows that the most powerful friction reduction and control ability occurs when the vibration energy of the two axes is equal. Finally, a high-vacuum micro-nano friction test system is built to solve the deficiency of the current experimental conditions in excitation, detection and noise control. This system is multi-functional, which can perform scanning through scanner or sample stage and excite the cantilever through photothermal method or piezoelectric method. Furthermore, it can also integrate Laser Doppler Vibrometer for in-situ and real-time vibration measurements. This system not only helps us to further study the influencing factors of vibration induced superlubricity, but also provides a platform for the study of dissipation in nanotribology.