由于具有良好穿透性、宽波长范围、低辐射能量等特性，太赫兹技术已在安全检查、卫星通信、生物医学等领域成功应用。但是，面向生物医疗的太赫兹探测器需要体积小、灵敏度高、可以在室温下工作，并具有生物相容性，现有探测器不能很好满足要求。针对以上需求，本论文研究了一种可在常温下工作的被动式微型太赫兹探测器，完成了相关设计、仿真和关键工艺实验。在理论分析基础上，设计了一种超材料吸收结构，实现了对中心频率为1THz太赫兹波的有效吸收。设计了具有“十字”图案的超材料吸收结构，并对吸收效率进行了理论分析和仿真验证。设计了基于多层材料吸收结构的制备工艺，完成了超材料吸收结构的加工和吸收率测试。设计了一种新型“蛇形”结构热敏电阻，对比并选择了合适的热敏材料，理论计算并仿真验证了热敏电阻部分参数对结构热力学性能的影响。完成了热敏电阻层的沉积工艺设计和参数优化，加工获得了均匀性一致的热敏电阻。基于结构力学和实际加工工艺，设计了微桥结构参数并对桥面层数、桥腿类型、形状参数等进行了优化。根据吸收层和热敏电阻层的材料和设计参数对其最大应力和应变进行了多物理场耦合仿真验证。设计了相应的加工工艺，通过加工实验优化了微桥结构参数，完成了主体结构加工。根据关键结构单项实验加工和测试结果，结合加工条件设计了器件的完整加工流程，开展了整体探测器结构的加工。

Due to its strong penetration, wide wavelength, and low energy, etc., terahertz technology has been successfully applied in security, satellite communications, biomedicine, and so on. However, for biomedical-oriented terahertz detectors, it is necessary to be small, sensitive, uncooled, and biocompatible, which are not yet well met by current detectors. In response to the above requirements, an uncooled passive terahertz micro-detector is studied, and related design, simulation, and key process experiments were completed.Based on the theoretical analysis, a metamaterial absorption structure has been designed to achieve efficient absorption of terahertz waves with the center frequency of 1 THz. A metamaterial absorption structure with a "cross" pattern was designed, and the absorption efficiency was theoretically analyzed and simulated. The preparation process based on multilayer metamaterials was designed, and the processing and absorption test of the metamaterial absorption structure was completed.A new "serpentine" structure thermistor was designed, and suitable thermosensitive materials were selected. The influence of the thermistor parameters on the thermodynamic properties was verified by theoretical calculations and simulations. The processing method and parameter optimization of the thermistor layer was completed, and the thermistor with good uniformity was obtained.Based on the actual structural mechanics, the structural parameters and the process method of the micro-bridge were designed and the number of deck layers, bridge leg types, and shape parameters were optimized. With defined materials and parameters, the maximum stress and strain were calculated by coupled multi-physics field simulation. The processing methods were designed, the microbridge structure parameters were optimized，and the main structure was completed.According to the above design, optimization, and machining results, a complete machining process has been designed, and the processing of the overall detector structure has been carried out.