在计算机、信息技术的推动下，电子洁净室内的生产工艺及工艺环境要求越来越严苛。目前常见的电子洁净空调系统采用新风处理机组（MAU）+干盘管（DCC）+风机过滤单元（FFU）的形式。在以往的研究中，对热湿和洁净处理过程及设备性能的特征，对空调系统优化的研究尚不充分。因此，本文开展了以下研究工作：首先，分析空调系统不同季节热湿处理过程及设备性能。热湿环境控制实现了室内排热和室内排湿的解耦，洁净室内热湿环境控制情况较好。不同季节热湿处理过程中，夏季新风先冷却除湿后再热，存在冷热抵消现象，在新风处理机组内冷热抵消比例为15.9-21.9%，在空调系统内冷热抵消比例为13.0%-17.9%，冬季存在新风加湿和除湿相互抵消现象，抵消比例为48.6%。设备性能方面，空调系统内的风机温升不可忽视。其次，分析空调系统的洁净处理过程及设备性能。室内洁净环境存在过保障的情况。洁净处理过程中，新风送风与室内回风所携带的颗粒物混合时会导致较大的掺混损失。设备性能方面，以0.3-0.5μm的颗粒物粒径为例，MAU内过滤器捕集的数量占总捕集数量的99.1%-99.7%，FFU内过滤器捕集的数量仅占不到1%，FFU风机功耗约是MAU风机功耗的1.9-3.4倍。再次，洁净室内显热由新风送风和室内回风承担，室内潜热由新风承担，室内产生的颗粒物由FFU内过滤器承担，新风所携带的颗粒物由MAU和FFU内过滤器承担。提出夏季取消新风再热的系统（优化系统Ⅰ），避免热湿处理过程中冷热抵消现象。提出MAU内冷热盘管共用的系统（优化系统Ⅱ），减少MAU风机功耗。提出一部分室内回风不经过DCC降温处理的系统（优化系统Ⅲ），避免热湿-洁净耦合。提出室内回风由G4级过滤器净化的系统（优化系统Ⅳ），避免掺混损失。在优化系统Ⅳ的基础上，减少室内循环风量（优化系统Ⅴ），FFU风机功耗减少。最后，与现有系统A厂相比，分析优化系统Ⅰ-Ⅴ的性能和能耗。优化系统Ⅰ-Ⅴ可以使DCC所需制冷量减少34.5%-54.0%，可以使MAU所需热量减少了51.5%，并在5-10月无需消耗热源。当冷源为低温制冷机，热源为蒸汽锅炉时（现有冷热源），优化系统总能耗减少16%-37%；当冷源为高温热回收和低温制冷机，热源为冷却水热回收系统（优化冷热源），优化系统总能耗减少24%-44%。
The production process and indoor environment requirements in the semiconductor cleanromms are becoming more and more stringent due to the improvement of the computers and information technonlogy. The air conditioning system of the cleanroom is composed of the make-up air unit (MAU) + dry cooling coil (DCC) + fan filter unit (FFU). However, limited studied have revealed the characteristics of heat, moisture and cleanliness treatment process and optimized the system`s structure. Thus, the following studies have been conducted in this paper:Firstly, the heat and moisture treatment process and performance of the air conditioning system in different seasons are analyzed. Decoupling of heat and moisture is realized indoor, and control of the heat and moisture environment indoor is well. As for the process of heat and moisture treatment, in summer, outdoor air is cooled and dehumidified, and then reheated. Cold-heat offset is in both MAU and system, which is 15.9-21.9% in MAU and 13.0%-17.9% in the system. In winter, outdoor air is cooled and dehumidified, and then humidified, with an offset ratio of 48.6%. As for the equipment performance, the temperature rises of fan in MAU and FFU cannot be ignored. Secondly, the cleanliness treatment process and performance of the air conditioning system are analyzed. Particles count concentration is much lower than the requirements of the standard. As for the process of heat and moisture treatment, the mixing loss of particles is caused due to the mixing of supplied outdoor air and indoor return air. The amounts of particles carried through outdoor air is 104-105 more than that generated indoor. The amounts of particles captured through the filter in MAU accounts for 99.1%-99.7% of the total, while that in FFU accounts for about 1% of the total. Power consumption of fan in FFU is about 1.9-3.4 times than that in MAU. Thirdly, indoor sensible heat is handled by supplied outdoor air and indoor return air, and indoor latent heat is handled by outdoor air. Particles generated indoor is handled by the filter in FFU, and partilces carried by outdoor air is handled by the filter in both MAU and FFU. System of canceling reheating in summer is proposed (optimized system Ⅰ), avioding cold-heat offset is in air conditioning system. System of combing the cooling and heating coils together in MAU is proposed (optimized system Ⅱ), reducing power consumption of fan in MAU. System which a part of indoor return air is not through DCC is proposed (optimized system Ⅲ), reducing power consumption of fan in FFU and avoiding the coupling of heat, moisture and cleanliness. System which indoor return air is purified by the primary filter is proposed (optimized system Ⅳ), avoiding the mixing loss of particles. On the basis of optimizing system IV, sytem of reducing indoor circulating air flow volume is proposed (optimized system Ⅴ), reducing power consumption of fan.Lastly, compared with the current system (the tested cleanroom of A), performance and energy consumption of optimized system is analyzed. In the optimized system Ⅰ-Ⅴ, reducing of the requried cooling capacity of DCC is 34.5%-54.0%, reducing of the requried heating capacity of MAU is 51.5%, and there is no heating consumption in May.-Oct.. When cooling and heating source are conventional chillers and steam boilors, respectively, total energy consumption of optimized system Ⅰ-Ⅴ is reducing 16%-37%. When cooling source are conventional chillers and high-temperature chillers, respectively, and heating source are heat recoveying system and steam boilors, respectively, total energy consumption of optimized system Ⅰ-Ⅴ is reducing 24%-44%.
