以微悬臂梁谐振器为核心的传感器，通过在表面进行敏感层修饰，可以利用敏感层吸附作用产生的质量变化来检测周围环境中特定分子浓度的变化。这类传感器因其微小的体积与质量，拥有比宏观机械设备更高的灵敏度，更快的反应速度以及更低的检测下限。同时，悬臂梁传感器的加工工艺与CMOS工艺容易兼容，有利于减小整个传感器系统的体积，在提高性能的同时降低成本。本文主要介绍了谐振悬臂梁传感器的设计以及工艺实现。通过对悬臂梁结构的数值仿真，提出并优化了悬臂梁的设计参数。根据结构需求设计加工工艺，选择合适的敏感膜材料，制定修饰方法。得到了均匀修饰石墨烯的悬臂梁，并成功实现优良的谐振性能。并在液体环境中验证了谐振悬臂梁的传感特性。本文通过介绍气体传感器的研究背景与研究现状得出了目前分子浓度传感器需要解决的关键问题。简述不同种类传感器的基本原理并对各类传感器的关键性能指标——检测下限与反应速度进行了比较。介绍了悬臂梁MEMS传感器的不同工作方式，对比了两种工作方式的优缺点以及典型的应用案例。理论上，分析介绍了悬臂梁谐振传感器的设计原则与具体的设计方法。从结构参数设计的角度出发，对悬臂梁的激励电阻与压阻电桥的掺杂浓度，朝向，尺寸以及其他相关的几何参数进行了分析与计算。然后依据设计参数对悬臂梁谐振器谐振性能进行了数值仿真。工艺上，针对结构设计需求设计了悬臂梁的体硅微加工与修饰方法。提出了基于SOI基片的悬臂梁结构工艺方案。针对加工中的关键工艺步骤进行单步工艺的仿真与验证。在成功加工悬臂梁结构的同时，为敏感材料的上载提供良好的载体。最终实现了还原氧化石墨烯在梁表面的均匀成膜。测试上，搭建了悬臂梁测试环境与并得到性能测试结果。基于全息测振系统，对器件的谐振特性进行了开环测试并获得悬臂梁的频响曲线，谐振频率与Q值。基于开环测试结果设计了闭环自激振荡电路系统，为整个系统小型化提供了条件。最终在液体环境下完成了针对牛血清蛋白浓度测试的传感器的性能验证。

Using the mass change caused by the adsorption of the sensitive layer, the sensor with micro-cantilever resonator can detect the change of specific molecular concentration in the surrounding environment by modifying the sensitive layer on the surface. Due to the small size and mass, these sensors have higher sensitivity, faster response speed and lower detection limit than macro mechanical equipment. Moreover the processing technology of the cantilever beam sensor is easily compatible with the CMOS process, which is beneficial to reduce the volume of the entire sensor system and reduce costs while improving performanceThis paper mainly introduces the study of cantilever sensor system modified by graphene. By the mechanical, thermal and electrical simulations of the cantilever structure, the design parameters of the cantilever beam are proposed and optimized. The processing is designed according to the structural characteristic. A micro-cantilever modified with uniformly distributed graphene was obtained, and excellent resonance performance was successfully achieved. Finally, a sensor with specific sensitivity to Bovine Serum Albumin (BSA)molecules was obtained.In this paper, the key issues that need to be solved by molecular concentration sensors are obtained by introducing the research background and current status of molecular concentration sensor. The basic principles of different types of sensors are introduced, and the key performance indicators of various types of sensors, the lower detection limit and the response speed, are compared horizontally. This explains the scientificity of sensor type selection. Then introduced the different working methods of the cantilever MEMS sensor, compared the advantages and disadvantages of the two working methods and typical application cases.Theoretically, the design principles and specific design methods of the cantilever resonant sensor are analyzed. From the perspective of structural parameter design, the excitation resistance of the cantilever beam and the doping concentration, orientation, size, and related geometric parameters of the piezoresistive bridge were analyzed and calculated. Then, the resonance performance of the cantilever resonator is numerically simulated according to the design parameters.In terms of processing, the bulk silicon micro-machining and modification method of the cantilever beam is designed according to the structural design requirements. According to the theoretical analysis and device requirements discussed in the second part, the cantilever structure process based on SOI substrate is designed. The key processes in processing are simulated and verified. While successfully processing the cantilever beam structure, it provides a good carrier for uploading sensitive materials. Finally, uniform film formation of reduced graphene oxide on the cantilever surface is achieved.In terms of testing, a cantilever test environment was built and performance test results were obtained. First, based on the holographic vibration measurement system, the open-loop test of the resonance characteristics of the cantilever beam was carried out. The frequency response curve, resonance frequency and Q value of the cantilever beam are obtained. Then the closed-loop self-excited oscillation circuit system of the cantilever designed for this feature is designed, which provides conditions for miniaturization of the entire system. Finally, the performance verification of the sensor for bovine serum protein BSA concentration test is achieved in a liquid environment.