半导体产业是国民经济和社会发展的重要产业，在半导体产业链中的半导体制造因其资金投入高，技术难度大，生产周期长等因素成为产业链中的重中之重。在半导体制造中，产出量和生产周期是一对相互制约的绩效指标，业界和学术界将调度的方法作为最主要的解决思路。本文首先分析了半导体生产调度的主导思想，其中启发式算法以其简易型、及时性以及合并使用后能使指标大幅提升等特点较好的适应了大规模、多重入、不确定性高的半导体生产线。在分析常用调度策略的优势以及缺点后，得出了“设计出一种机制使得在制品在各个Area的分布与其加工能力相适应”的研究思路。同时分析了半导体生产企业H公司C厂的调度现状，新的调度策略需要适应企业专注产品差异化和技术差异化战略的细分市场的策略。其次在分析应用极其广泛的互补金属氧化物半导体以及非挥发性半导体储存器的工艺流程，以及多重入设备群组在其工艺流程上的分布状况后，将生产流程分割成十个分段，主要目的是使不同的多重入设备群组的各个工艺步骤较为集中地分布在几个分段中，以便于通过控制各个分段的生产参数对系统的瓶颈设备进行精细管理，进而达到优化系统产出量与生产周期的目的。在制品水平与瓶颈设备负载率、产出量之间的相关性以及未完成工艺步数与瓶颈设备负载率之间的关系表明：两个参数都是与瓶颈设备负载率相关的系统参数，单独使用对生产线进行调度则缺点明显，进而得出需要研究这两者的复合启发式算法。同时给出在制品水平以及瓶颈设备未完成工艺步数目标值设定方法。最后对基于在制品水平以及瓶颈设备未完成工艺步数的分段生产调度策略进行研究，通过各设备群组的分段参数目标值的设定、监测、反馈、对策实施等步骤的循环，降低系统变动性对系统瓶颈设备的影响，进而优化产出量以及生产周期，并在H公司C厂进行实施验证。另外本文还研究了分段生产调度策略在识别系统瓶颈设备、预测瓶颈漂移等方面的应用。本文所研究的半导体分段调度策略综合考虑了半导体生产工艺以及多重入的特点，结合在制品水平和未完成工艺步数两个参数，其目的是使得瓶颈设备所在分段的在制品水平以及分布与该分段的生产能力相适应。通过实践检验该调度策略在优化瓶颈设备产出和生产周期方面取得了一定的效果。

The semiconductor industry is important for national economic and social devel-opment. The wafer fabrication in the semiconductor industry chain has become a top priority due to its high capital investment, technical difficulty and long production cy-cle time. The output and the production cycle time in semiconductor wafer fabrication is a pair of mutually constrained performance indicators. The method of scheduling is regarded as the main solution in industry and academia. In this thesis, the segmenta-tion scheduling strategy is used to optimize the output and the production cycle time.Firstly, the predominant ideas of semiconductor production scheduling are ana-lyzed in this thesis. Among these, the heuristic algorithm is well adapted to the large-scale, multiple reentry and high uncertainty wafer fabrication line because of its good characteristics such as simple, timely and great improvement of the indexes by combination etc. Considering of the advantages and disadvantages of the commonly used scheduling strategies, a best study route is necessary which can design a mecha-nism to make the distribution of products in each area matching to its production ca-pabilities. After analyzing the current situation of the dispatching in the semiconductor manufacturer, in Company H Factory C, the new scheduling strategy needs to adapt to the niche market strategy of the company which focusing on product and technology differentiation.Secondly, the production process flow is divided into ten segments after analyz-ing the process flow of the CMOS (Complementary Metal Oxide Semiconductor) and NVSM (Non-Volatile Semiconductor Memory) which are widely used, and the distri-bution of the multi-reentry equipment groups in its process flow. The main purpose is to make the process steps of each different multi- reentry equipment group more con-centrated in several segments, so as to finely manage the bottleneck equipment of the system by controlling the production parameters of each segment, thereby achieving the purpose of the output and the production cycle time optimization. The relationships among the work in process (WIP) level, the number of unpro-cessed steps (UPS), the bottleneck equipment load rate and the output indicate that WIP and UPS are the system parameters related to the bottleneck equipment load rate. However, the weak points are obvious if using these two parameters independently to schedule the production line, and it is concluded that the heuristic algorithm needs to be studied by the composition of both parameters. Furthermore, the thesis explains one method of setting the volume targets of the segment WIP & bottleneck equipment’s UPS.Finally, by studying the segmentation production scheduling strategy based on the WIP level, the number of UPS of the bottleneck equipment, the segmentation parame-ter value targets setting, monitoring, feedback and countermeasure implementation, the impact of system variability on the bottleneck equipment is reduced, the output and the production cycle time is optimized consequently. The scheduling strategy has been implemented and verified in Company H Factory C. In addition, the thesis also proposes the application of the segmentation production scheduling strategy to identi-fy the system bottleneck equipment and predict the bottleneck drift.In summary, the semiconductor segmentation scheduling strategy has been stud-ied in this thesis comprehensively considering of the semiconductor production pro-cess flow and the characteristics of multi- reentry, with the two parameters of the WIP and UPS. The purpose of which is to make the WIP level and distribution of the seg-ment where the bottleneck equipment is located compatible with the production capac-ity of the segment. By testing in practice, the scheduling strategy has achieved certain effects in optimizing the bottleneck equipment output and the production cycle time.