基于电力系统当前电压电场量测场景的多样化，以及现有及在研传感设备应用的限制与问题，论文创新性地提出了多种基于界面耦合效应的电压电场微型传感机理，用数学理论与物理模型的计算仿真对传感性能进行预测与评估，筛选出最佳耦合传感方案进一步研究与开发。论文通过微加工技术和传感测量技术，实现了微型电场传感器件的制备与稳态动态性能测试，获得的了最大测量电场15.7kV/cm、测量精确度低于2%、测量带宽DC-100kHz的压电压阻耦合的微信电场传感器件，从而为适用于智能电网的微型电场传感器件的研发提供一个更为可行有效的参考。 论文首先提出了压电磁阻的应变耦合机理、氧化物铁磁的界面电荷耦合机理、以及压电压阻的应变耦合机理，建立数学物理模型对机理预测与评估，并简单制备三种器件进行实验的验证，确定了电场对三种原理器件的调控作用。综合性能、制备等条件，论文拟选择压电压阻耦合的微型电场传感器进行深入研究。 基于压电压阻耦合机理，论文设计了微型化的电场传感器件结构，筛选出最佳的压电材料与压阻材料并进行了独立性能测试。通过搭建器件物理模型，仿真分析了微型电场传感器件的稳态特性、频率响应特性和时域暂态特性，在1mmx1mmx0.3mm的器件中能获取测量电场至百kV/cm、截止频率1MHz的微型传感器件。论文在设计的传感器结构基础上，设计了多样化的芯片布局与器件制备的微加工流程，并对加工各环节进行了性能测试及显微视图观察。搭建了直流交流电场测试平台，对器件的稳态响应和频率响应进行测试。获得了具有广泛测量电场、宽频高精度的压电压阻耦合的微型传感器件。论文从加工材料、结构尺寸及工艺流程三个方面对压电压阻耦合的微型化电场传感器件进一步优化并给出预期效果评估。 论文在最后提出了两种耦合型微型传感方案，基于压电效应的电容型电场传感方案和基于磁电效应的电场传感方案，经过实验验证与理论仿真，获取了两种新型微型器件稳态性能，并针对器件关键参数进一步探究了性能优化问题。拟将该传感机理作为电场传感的进一步研究工作重点。
Along with the diversification of voltage and electric-field measurements in the great power grid, the present sensing facilities in application and state-of-the-art research meet the challenges of high-magnitude and wide-bandwidth sensing achieved by microchips. This paper innovatively proposed multiple mechanisms based on interfacial coupling effect for the purpose of electric-field micro sensors. With mathematical calculation and physical modeling, the performances from different mechanisms are predicted and evaluated, and finally a proposal based on piezoelectric-piezoresistive coupling effect was selected out and further operation was then carried out. This paper has realized a micro sensor with maximum electric-field at 15.7kV/cm, measurement accuracy less that 2%, and frequency bandwidth from DC to 100kHz, which provides a more practical and reasonable method for the sensor network in smart grid.This paper first proposed the piezoelectric-magnetoresistive coupling mechanism, oxidation-ferromagnetic interfacial charge coupling mechanism, and piezoelectric-piezoresistive coupling mechanism. Mathematical and physical model was constructed and evaluated the reasonability. In addition, experimental research was conducted and verified the electric-field modulating performance. In a comprehensive consideration of sensor performance and micro-fabrication, this paper focused on the piezoelectric-piezoresistive coupling effect and had a further exploration of micro electric-field sensor.Of the piezoelectric-magnetoresistive coupling mechanism, the micro structure was designed and optimized materials were engineered and tested independently. Physical model simulated on the FEM platform COMSOL Multiphysics concluded that this design with 1mmx1mmx0.3mm dimensions could obtain the measurement of electric-field up to hundreds of kV/cm and 1MHz frequency.Aiming at the piezoelectric-piezoresistive micro structure, diversified chip layout on the wafer was deliberately designed and micro-fabrication process was explicitly planned and carried out. Each process in micro fabrication was tested passing the requirements. In the DC & AC electric-field testing setup station, we obtained the steady response and frequency-domain response, and confirmed the achievable requirements of high magnitude, wide frequency, and high accuracy in the electric-field micro sensor with piezoelectric-piezoresistive coupling effect. This paper provides further optimization methods and the corresponding improved performances for this micro sensor in the respects of material engineering, structure and dimensions, and fabrication process.In the last, this paper suggested two new proposals with interfacial coupling effects, one is named piezoelectric-capacitive electric-field micro sensor, the other is magnetoelectric micro sensor. Both theoretical analysis and experimental verification supported the feasibility of the two in the future applications. This paper started more methods for the exploration of electric-field micro sensors in the application of sensor network in smart grid.
