壁虎拥有卓越的攀爬能力，可以在自然界中多种表面上稳定、快速地爬行。通过对壁虎运动过程的分析及其黏附结构的观察，研究人员指出为了保证壁虎稳定、可靠及灵活的运动，其黏附系统应具有适应性、可控性和耐久性的特点，这也是仿壁虎干黏附表面设计和制备过程中需要考虑的三个重要因素。但是，目前制备的仿壁虎表面还无法在这三个方面与壁虎刚毛相媲美。为了促进仿壁虎表面在工程中的应用，本文系统地研究了制备工艺对仿壁虎表面上述三个特征的影响，同时研究了相对湿度和真空等环境因素对仿壁虎表面黏附/摩擦性能的影响。为研究仿壁虎表面在不同环境下的黏附/摩擦特性，设计并搭建了可控环境黏附/摩擦测试平台，可以研究包括温度、真空度、相对湿度和气体成分等在内的环境因素的影响。自制的二维双悬臂梁可具有较大的柔性，可根据样品的特点选择不同刚度的悬臂梁。另外，系统还可实现对样品和压头接触状态的实时观测。用光刻技术制备纤维状仿壁虎干黏附表面。研究发现倾斜纤维可以使仿壁虎表面获得黏附/摩擦各向异性；增大纤维头部尺寸和增加纤维多等级结构可以增大仿壁虎表面的黏附强度；将纤维头部设计成抑制裂纹扩展的形状有助于实现表面的动态自清洁。此外，系统研究了预载荷、接触停留时间、脱附速度、剪切距离和剪切方向等因素对黏附/摩擦特性的影响。为解决光刻和气相生长等制备工艺存在的操纵复杂、成本高和样品面积小等的缺点，提出了基于超精密单点金刚石切削技术制备楔形仿壁虎干黏附表面的方法。该方法制备的仿壁虎表面具有良好的黏附/摩擦各向异性，可在剪切过程中实现动态黏附，且在真空环境中黏附作用不会被削弱。减小楔形结构的角度可以提高仿壁虎表面的黏附/摩擦强度，但是会降低黏附/摩擦可控性。楔形结构还有利于实现类似于“荷叶效应”的自清洁。研究了毛细作用对楔形阵列仿壁虎表面黏附/摩擦的影响，发现毛细力的贡献会使仿壁虎表面的黏附强度和黏附各向异性增强，但是摩擦力受其影响较小。基于楔形阵列仿壁虎干黏附表面的黏附/摩擦可控性设计并制作了仿壁虎干黏附夹持器，并在真空/大气环境下实现了对图案化晶元的拾取、转移和释放，这对促进仿壁虎干黏附器件的应用具有重要的意义。

Gecko shows remarkably reliable and swift climbing capability on almost any surfaces in nature, which has captured people`s attention for a long time. Through the observation of the gecko`s locomotion and the adhesive system on the feet, researchers have proposed that the adhesive system should meet the following three characteristics to ensure the safe climbing, namely adaptability, controllability and durability, which also should be the features of the gecko inspired dry adhesive surfaces. Unfortunately, among the various gecko-inspired surfaces, no artificial adhesives could match the three advantages of the gecko seta simultaneously. To facilitate the application of the gecko inspired surfaces, this work systematically studies the influences of preparation technology on the three features of the gecko inspired surfaces mentioned above. Moreover, the effects of environmental factors (relative humidity, vacuum etc.) on the adhesion and friction performance of the gecko inspired surfaces are also investigated.To study the adhesive and frictional properties of the gecko inspired surfaces in different environments, a testing platform with a controlled environment chamber is designed and built, and the temperature, vacuum, relative humidity and gas composition in the chamber could be controlled. For a more accurate measurement, stiffness of the two dimensional double cantilevers could be adjusted according to the characteristics of the samples. In addition, the real-time contact state between the indenter and the sample is visible by the non-contacting force measuring system.Using the conventional lithography, fibrillar gecko inspired surfaces are developed. The testing results reveal that: 1) the inclined fibers make the gecko inspired surfaces have the anisotropic adhesion and friction; 2) increasing the tip size of the fiber and adding the hierarchical structure to the fiber could enhance the adhesive strength; 3) the gecko inspired surface would show a dynamic self-cleaning property when the tip shape of the fiber is designed to suppress the crack propagation. Additionally, influences of the testing parameters (load, contact time, retracting velocity, sliding direction, sliding distance etc.) on the adhesion/friction performances of the samples are studied systematically.To overcome the shortcomings (complex, low yield, high cost, small sample size) of the traditional preparation technology, an ultraprecision diamond cutting method is firstly proposed to fabricated the gecko inspired wedged surfaces. The achieved gecko inspired surfaces show obvious anisotropic adhesion and friction when sliding in the gripping and releasing direction, respectively. Similar to the gecko seta, the wedged sample reveals a dynamic adhesion during sliding in the gripping direction. The adhesive property of the sample changes little when tested in vacuum, revealing the characteristics of van der Waals interactions of the gecko inspired adhesion. In addition, reducing the wedge angle of the samples would enhance the adhesion and friction, but could weaken the anisotropic property. The wedged structures could be beneficial to the wet self-cleaning property of the samples, similar to the ‘lotus effect’. Influences of the capillarity on the adhesion/friction of the gecko inspired wedged surfaces are studied. Due to the contribution of the capillary force, the strength and anisotropy of adhesion would be enhanced, but the friction keeps almost constant.Based on the flexibly controlled adhesion and friction of the gecko inspired wedged surfaces, a three-legged gecko inspired dry adhesive gripper is designed and fabricated. The gripper is demonstrated to successfully pick up, transfer, and release a patterned silicon wafer in atmosphere and vacuum, which will promote the application of the gecko inspired dry adhesive devices.