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基于还原法石墨烯的新型柔性器件研究

Novel Flexible Devices Based on Laser and Thermal Reduced Graphene

作者:陶璐琪
  • 学号
    2012******
  • 学位
    博士
  • 电子邮箱
    tao******com
  • 答辩日期
    2017.05.26
  • 导师
    任天令
  • 学科名
    电子科学与技术
  • 页码
    128
  • 保密级别
    公开
  • 培养单位
    026 微纳电子系
  • 中文关键词
    石墨烯,激光还原,热还原,柔性器件,力声融合器件
  • 英文关键词
    graphene, laser reduction, thermal reduction, flexible devices, integrated acoustics-mechanics device

摘要

石墨烯材料具有优异的电学、力学、热学等性质,近年来引起了国内外学术界和产业界的广泛关注,科学家们在石墨烯材料及其器件技术方面开展了一系列研究,并积极探索其在生物、医疗、可穿戴等领域的可能应用。本论文以石墨烯材料为核心,从石墨烯声学器件、石墨烯力学器件以及石墨烯力声融合应用几个方面,开展系统性研究,一方面提升了石墨烯器件的性能参数,另一方面还拓展了石墨烯的应用领域,为石墨烯材料与器件进行更深层次的研究以及走向实用化奠定基础。论文基于激光直写技术,制备了激光还原的石墨烯声学器件。从热声效应机理出发,通过仿真工具探索影响热声器件性能的各项因素,并通过实验手段对理论进行验证;与传统声学器件相比,石墨烯声学器件基于热声原理,不依赖机械薄膜振动,不会产生机械谐振现象,因此声学频谱平坦宽广;此外,论文搭建了基于全柔性石墨烯耳机的音频信息系统,推动声学领域的新突破。论文基于激光图形化加工技术,研制了性能可调控的石墨烯应力传感器。相比传统应力传感器,通过调节石墨烯的图形结构,可以实现高灵敏度与长拉伸范围的兼顾,具有重大学术价值。因此,基于激光图形化技术制备的石墨烯应力传感器既可以用于检测微弱应力信号,也可以用于检测大幅度应力信号,从而涵盖检测绝大多数人体运动行为,在可穿戴领域具有广泛应用。论文基于热还原技术,研制了三维多孔蜂窝式石墨烯压力传感器和二维纸基石墨烯压力传感器。三维多孔蜂窝式石墨烯压力传感器以多孔方糖为模板,聚二甲基硅氧烷为支撑层,形成了特殊的多孔蜂窝结构,具有大量程工作范围;而二维纸基石墨烯压力传感器得益于其独特的纸纤维及空气通路结构,具有极高的灵敏度。因此,其可以同时实现微弱压力与大量程压力的检测。论文提出并实现了基于多孔石墨烯微结构的新型力声融合器件。多孔石墨烯具有良好的热学特性和力学特性,一方面可以基于热声效应发射声音,另一方面可以同时基于压阻效应接收声音,从而实现声音收发一体化。论文提出了智能人工喉,其通过贴附于喉咙处,配合微处理器识别聋哑人发出的低吟、尖叫等特殊声音,并将该无含义声音转换为幅度、频率可控的声音,从而有望辅助聋哑人“开口说话”,在生物、医疗、声学等领域具有重要学术意义。

Graphene has attracted enormous researchers’ interests due to its excellent electrical, mechanical and thermal properties in recent years. A series of novel flexible devices based on graphene have been successfully developed and applied in biological, medical and wearable fields. In this thesis, graphene material is focused and graphene sound sources, graphene strain sensors, graphene pressure sensors and graphene integrated acoustics-mechanics devices are systematically researched. On one hand, the performance of graphene-based devices has been remarkably enhanced, on the other hand, the applications of graphene have also been expanded. Therefore, the thesis will be the basis of deep research on graphene and promote the practicability of graphene.In this thesis, graphene sound sources are achieved by laser scribing technology. Beginning from the basic principle of thermoacoustic effect, we explore the influence factors of thermoacoustic devices by simulation tools and verify the results by experiments. Compared with conventional acoustic devices, graphene sound sources do not contains mechanical vibration membrane, so they won’t cause mechanical resonance, resulting to a broad and flat frequency spectrum. In addition, an audio information system based on whole flexible earphone is built, which will cause a completely revolution in acoustic fields.Graphene strain sensors with tunable performance are manufactured by laser patterning technology. Compared with conventional strain sensors, the tunable graphene strain sensors can realize high sensitivity and large strain range simultaneously, which demonstrate significant academic values. Therefore, the graphene strain sensors prepared by laser patterning technology can be used to detect both weak motion signals and large body motions simultaneously, which can cover the majority of human behavior detections. These tunable strain sensors will have a wide applications in wearable areas.Three-dimensional honeycomb graphene pressure sensor and two-dimensional paper-based graphene pressure sensor were fabricated based on thermal reduction. For three-dimensional honeycomb graphene pressure sensor, a cube sugar is chosen as the template and polydimethylsiloxane is poured into the cube sugar template to form a unique honeycomb porous structure. The honeycomb structure has a better response under a lager pressure range. For two-dimensional paper-based graphene pressure sensor, the special paper fiber structure and air gap can result in a higher pressure sensitivity. Therefore, two types of graphene pressure sensors will be suitable for pressure detection in both gentle and large-scale occasions.We realize a novel integrated acoustics-mechanics device based on porous graphene which has excellent thermal and mechanical properties. On the one hand, porous graphene can emit sound based on thermoacoustic effect. On the other hand, it can also detect sound based on piezoresistive effect. Therefore it can realize the functional integration of emitting sound and detecting sound in a single device. We come up with an intelligent artificial throat which will assist for the deaf-mute persons by attached on their throat. The hum, screaming or other special sounds generated by the deaf-mute persons can cause the vibration of throat which will be detected by porous graphene, and these meaningless sound can be converted into sound with controllable volume and frequency. Therefore it may assist the deaf-mute persons "speak" in the future and it presents tremendous academic values and promising applications in biological, medical, acoustics and other fields.