柔性电子作为一种新兴电子技术，突破了人们对传统电子器件平面、坚硬的固有印象，自提出以来就备受关注。随着技术的发展和人们对健康医疗的重视加深，利用可延展柔性电子器件与人体集成，提升现有医疗水平是柔性电子技术的发展趋势。本文围绕可延展柔性电子器件与人体健康监测领域中的若干问题，主要开展了如下研究：首先，针对人体皮肤汗液分泌和体表呼吸等生理需求，提出利用微纳米多孔结构的尺寸效应，实现可延展柔性温度传感器防水透气的类皮肤性质，解决人体皮肤与电子器件不同通透性需求矛盾。同时，发展液体转印方法成功制备出该器件，并利用一系列人体实验验证了该策略可以有效解决器件长期与人体集成时生物兼容问题。其次，利用柔性混合集成技术将可延展温度传感器与集成芯片集成，形成面向呼吸监测的独立集成器件。利用力学原理设计出适应面部复杂几何形貌的器件结构，提出压缩屈曲构型作为传感器工作形态以提高信噪比，发展2步转印法的可延展电子器件制备方法。该集成器件既有易于与人体舒适集成，又兼具高效无线传输功能。实验证明该器件可实现多场景连续呼吸监测。然后，以基于集成芯片的柔性电路为研究对象，用实验和理论分析了集成芯片与基底界面失效机理。利用压缩屈曲实验对芯片与基底连接处定量地施加弯曲载荷，观察失效界面。同时，基于梁理论与弹性双材料界面模型建立器件受弯曲变形时力学模型，给出器件临界曲率表达式，揭示材料、几何参数对提升系统弯曲能力的贡献度，从而为集成芯片与柔性基底集成器件的优化设计提供理论指导。最后，基于力学原理和2步转印法，设计并制备出基于金属温阻效应的可延展柔性温度传感器阵列。对阵列器件各项性能进行表征，利用该器件实现点热源温度场测量以及对固、液、气多种环境刺激的动态测量，同时，探究了器件通过控制佩戴物背温策略初步实现物体形状识别的能力。该研究对于与体表温度场相关的人体医疗健康监测以及机器人/假肢皮肤功能构建具有重要意义。
The burgeoning stretchable and flexible electronics technology is transforming the stereotype image of traditional planar and rigid electronic devices thus attracting lots of research interest. With the development in technology and the increasing desire in health, integrating stretchable and flexible electronics with human body to improve the healthcare is definitely the tendency. This dissertation is focusing on the key issues in stretchable and flexible electronics integrated on human body for health monitoring. Firstly, given the perspiration and breathing of the human skin, micro-nano pores are introduced into the substrate to enable the stretchable and flexible devices with the ability to be permeable to sweat vapors while being water proof to protect the electric circuit when integrated with human skin for long term monitoring. It solves the contradiction of the permeability of the skin and the devices. Transfer printing in solution method is developed to fabricate such prototype and systematic in vivo tests are conducted to verify its biocompatibility in long term integration with human skin.Secondly, hybrid integration strategy is proposed to integrate stretchable temperature sensor with IC chips to realize the mask-like flexible respiration monitoring device. It is fully integrated with breath sensors, circuits for data acquisition and wireless transmission together with the power system, thus endowed with stretchable sensor’s superiority in dealing with human body as well as IC chips’ high efficiency and reliability in data processing and transmission. The whole device structure is designed with guidance of mechanics theory in order to fit into the complex topography of human face. Stretchable temperature sensor in buckled configuration is suggested for the sake of better signal to noise ratio. Two-step transfer printing method is proposed to fabricate the stretchable temperature sensor and other stretchable devices with metal functional material. Experiments are carried out to demonstrate this device’s ability in accurate and continuous breath monitoring during all kinds of daily activities.Then, the interfacial failure of the IC chip integrated on flexible substrate with bending deformation is studied theoretically and experimentally. The compressive buckling test is used to apply bending deformation on the interface quantitatively, after which the failed interface is investigated by scanning electron microscopy. The theoretical model of the IC chip integrated on flexible substrate on concern of bending deformation is built based on the beam theory and the two elastic layers interface model, by which the expression of critical curvature is obtained. The relationships between the critical curvature and the material and geometry parameters of the device are discussed, which offers guidance in the device optimization.In the end, stretchable and flexible temperature sensor array is designed and fabricated with the mechanics principles and aforementioned two-step transfer printing method. After characterization and calibration the device is used to measure the temperature field with a spot heat source and temperature stimulations caused by solid, liquid and flow. It turns out that the device is able to capture the temperature distribution around a spot heat source, and it is capable of rapid response to dynamic heat stimulation by identifying the location and the strength. Also the strategy based on background temperature controlling is proposed to identify the object’s shape by measuring the temperature field variation with the device. This study is of high value to the surface temperature field based human health monitoring as well as the skin bionics in robots and prostheses.
