压电微电机是利用压电陶瓷材料作为的核心驱动部件的电动器件。该电机可以在微型化、集成化的同时，保持压电微电机有较高的转换效率和输出力矩。因此，新型压电微电机的研究已成为各国学者竞相研究的重点。微型压电电机的应用前景广阔，领域涉及精密仪器、生物医药技术、微流体技术、微型机器人技术等。目前，在压电电机的研究中还有一些问题有待解决，比如：压电陶瓷驱动电压较高，微电机结构的驱动机理研究，电机力矩输出不足等。针对这些问题，本论文研究了一种棒板结合结构的压电微电机，对电机的尺寸进行了优化设计，分析了振动模式的简正态频率值的变化情况与压电电机结构的关系；分析了模态耦合现象对电机性能的影响，研究了分离电机耦合模态的两种方法并进行了实验验证。为完成压电电机的具体性能指标要求，本论文提出了电机结构的改进方案。通过提供一种更加对称的结构并采用双转子的驱动方法，在简化电机结构的同时，大幅的改善了电机的性能参数。制作了压电微电机样机，通过试验测试了电机的转速、力矩等性能；实验证明改进后的电机可以提供原有电机4倍的输出力矩。本文基于压电陶瓷逆压电效应原理，提出一种新型的可直线运动的压电陶瓷驱动器。该驱动器定子采用棒板结合式结构，一个中轴的两端分别连接了两个对称的圆形平板，圆板与中轴相互垂直。两片陶瓷分别粘接在定子的两圆形平板外侧，对定子激振形成两圆平板的交替式跨步直线运动。该驱动器在小载荷、高精度精密定位等场合具有很好的实用化前景。本文还设计制作了与电机配套的超声小电源，该电源可以良好的提供电机转动所需要的驱动电压。该电源还有可以控制正反转的开关。

Piezoelectric ceramics with large power density have been used as transducer in the piezoelectric micro-motors, which can get higher efficiency and output torque. Therefore, new types of piezoelectric micro-motors have been the focus of research field. It can be applied in the fields of precision instrument; bioengineering and other micro actuate systems.A type of disk–pivot piezoelectric micro-motors has been studied and tested in this article. The author made an optimizing analysis of the transducer by FEM. The effect of modes coupling and the frequency separation from one vibration mode were studied. The methods of separate the modes coupling were given. In order to fulfill the required parameters of the motor operation, another type of disk–pivot motor has been designed and fabricated. By offering a more symmetrical structure and employing double rotor driving, the new motor can achieve a better performance. According to the experimental results, the output torque of the new disk–pivot motor is four time larger than the former one. Based on the contrary piezoelectric effect of the piezoelectric ceramic, a new type of linear piezoelectric actuator has been designed and tested. The motor stator also has a structure of disk–pivot. Two ceramic discs are stuck to the out Lateral of the two disks of the stator. The step vibration can be excitated by the warping vibration of the ceramics. The motor has good prospects for the practical use of.A type of ultrasonic source has been fabricated. It can provide the driving voltage for the motor. The source also had the switch to control the positive and reverse working modes.