染料旋涂是可写光盘（仅指CD-R/DVD-R）复制生产的核心工艺，对其工艺理论的研究涉及到粘性流体动力学、薄膜光学和光谱化学等多学科专业知识。染料溶液在可写光盘基片上的流动受到离心力，科氏力，重力，风剪切力，粘性力，表面张力，溶剂挥发，表面滑移等多种力和作用的影响。由于模型差异，一般工业旋涂理论不适合分析染料旋涂工艺。旋涂液在具有亚微米尺寸形貌的旋转基片上流动机制研究是旋转圆盘系统理论的重要前沿，同时也为高密度、超高密度可写光盘高质量复制工艺提供理论参考。本论文主要内容有：利用粘性流体力学中旋转圆盘系统理论在旋转参考系上建立具有普遍意义的旋涂动力学方程。建立旋涂液在可写光盘基片表面上的流动力学模型，考虑表面张力对运动方程的影响和表面滑移效应对边界方程的影响，推导出牛顿流体在具有亚微米尺寸微观形貌基片上旋涂的控制方程。并且分析薄膜表面风剪切力对染料旋涂的影响。将基片表面形貌影响简化为流体流动中所受到的动压力阻力，推导出宏观膜厚演变公式，并利用旋涂实验进行验证。在理论仿真基础上，修正Meyerhofer 挥发理论中临界点位置，分析溶剂挥发对旋涂的影响，结合实际生产工艺建立三步简化旋涂模型。利用陡度反正切函数曲线模拟基片表面微观形貌及染料薄膜表面分布，利用五个特征断面间能量守恒和流量守恒分析微观膜厚分布。基于实验建立了光密度曲线模型，利用四个特征点、三个特征线段、两个特征效应描述和分析旋涂工艺，并提出闭环生产控制模型；利用光学多层薄膜理论研究染料层光学特性，作出n-k-T、n-k-R、n-k-A仿真曲线，为染料材料研发提供依据；分析不同波长测试的光密度和膜厚的线性相关度，提出可写光盘岸上膜厚和槽内膜厚设计原理；依托实际生产线，进行大量离线和在线工艺实验，并利用光密度曲线模型对旋涂的3个恒速阶段、3个加速阶段、1个减速阶段及10个工艺参数进行分析。

Dye coating is the key part of recordable disc replication process. Study on flow mechanism of dye solution on rotating substrate with pre-groove is the latest development of rotating disk system theory and can lay the foundation for realization of replication process with high quality for high density and super-high density recodable disc. The main content is as followings.Based on the dynamics equations of viscous fluid, the general dynamics equation of spin coating in the reference system is founded. The effect of surface tension is added to motion equation and the effect of surface slip is added to boundary equations. Then the governing equation is given. The effect of wind shear force on dye coating is also considered.The effect of micro-geometry in substrate surface on dye coating is regarded as a flow resistance. Then the evolution equations of macroscopic film thickness profile are derived, which accord with experimental results. Based on simulative experiments Meyerhofer’s evaporation model is revised. The effect of solvent evaporation on dye coating is studied and the simplified three-step coating model is founded. The topography profile on substrate surface and the dye film profile on topography are simulated by arctangent functions with steepness. The microscopic thickness profile of dye film is analyzed by principles of energy conservation and mass conservation.The optical density curve model is applied to explain and analyze dye coating process, which includes 4 characteristic points, 3 characteristic line segments and 2 characteristic effects. Using this model the closed loop control for recordable disc production is realized. The optical characteristic of dye film is studied through optical multi-layer film theory. And the simulated n-k-T curve can be used for research and development of dye materials. The linearity between dye film thickness and optical density measured by different wavelength is analyzed. The design method of dye thickness on land and in groove is given. A lot of in-line and off-line process experiments with the help of real production lines is done. By using of optical density curve model 3 stages with constant speed, 4 stages with changing speed and 10 process parameters are studied.