本文完成了微型泵和微型阀的研制及其性能测试，解决了体硅异向腐蚀等几个关键工艺技术难题，建立了微型阀的结构-流体耦合模型并进行了仿真，系统地总结了等效电路网络建模方法，并进出了压电致动微型泵的等效电路网络模型。本文对当前国内外微机械的发展，特别是微机械制造技术和微型泵、阀的研究做的较为全面的总结。根据国内外的进展和国内的技术条件，以及国内目前的应用需要情况，确定了本文的主要目标为完成微型阀和微型泵的设计制造，同时研究相关工艺、测试方法和理论。微型泵和微型阀的制作以单晶硅为基底，采用硅微细加工工艺，同时根据微型机械结构特点开发了一些专用工艺。本文对微型泵和微型阀的制作中遇到的体硅各向异性体育馆工艺、牺牲层腐蚀技术、深层重掺杂自停止腐蚀技术和双面光刻技术等关键工艺技术做了较为深入的研究，确定了各个工艺环节的典型工艺流程。这些工艺研究成果扩展了微机械器件的设计空间，为工艺流程的安排提供了新思路。本文还创造性地提出了用重掺杂自停止腐蚀的办法防止凸角腐蚀，并在单晶硅微型阀的制造中成功地得到了应用。本文提出了微型泵泵膜的力学模型 －边缘固支的等厚度弹性薄板，分析了在均匀载荷、集中载荷和流体载荷下的大挠度和小挠度变形；提出了双层压电梁的力学和电力学模型，推导了双层压电梁的输入－输出关系矩阵，并求解了作用在弹性支撑（泵膜）上的变形公式。从Bernoulli方程出发，本文建立了微型阀的结构 －流体耦合模型，用损失头的分析对模型进行了分析和仿真。为了更精确、迅捷地对微型泵进行分析，本文总结了等效电路网络法，通过电容式微机械传感器探讨了微机械器件等效电路网络的建立方法，分别分析了微型泵的各个单元器件的等效电路子网络，建立了微型泵的等效电路网络模型。为了有效地实现微型泵的流向控制，我们研制了聚酰亚胺微型阀和单晶硅微型阀。第一次成功地将高分子材料 － 聚酰亚胺作为功能结构材料应用在微机械器件上，通过反复实验确定了聚酰亚胺的各工艺参数。成功地应用深层重掺杂自停止腐蚀技术制造出单晶硅微型阀和微型泵的泵膜，膜厚误差小于10％。两种微型阀均将出口阀和入口阀加工在同一个或同一组芯片上，使微型泵集成度更高。聚酰亚胺微型阀的正向过流能力大于20ml/min，无反向泄漏，反向承载能力大于500kPa；单晶硅微型阀的正向过流能力大于20ml/min，反向泄漏小于20ul/min，反向承载能力大于50kPa。本文研制的微型泵采用双层压电梁驱动，单面驱动，单侧出口，圆形泵膜，设计有专门的支座和封装结构。压电致动微型泵的最大流量365ul/min，最大背压2.38kPa，流量控制精度优于1ul/min。最后，作者系统地总结了本论文工作的主要成果和贡献。

The micropump and microvalves are fabricated and their performances are tested in this dissertation. Some key technologies, such as anisotropic bulk established and simulated. The modeling method of equivalent circuit network is summarized and the equivalent circuit network of PZT-driven micropump is presented. The development of MEMS, especially of micromachining techniques, micropumps and microvalves, are introduced in detail in this dissertation. The main objectives of this dissertation are the design and fabrication of micropump and microvalves as well as the research on related processes, test methods and theories, which are based on the recent worldwide developments in this field and the domestic technique condition and demand. The fabrication of micropump and microvalves is based on a silicon micromachining process while the fundamental fabrication is using semiconductor process line. Some special processes that are required for the fabrication of MEMS devices ought to be developed. The techniques of anisotropic bulk etching, sacrificial layer, etch-stop by high density doping with deep thickness and diprosopia photolithography are studied thoroughly. The parameters of these processes are determined, and typical process flows are given. The above achievements enlarge the degree of freedom of desigh of MEMS devices, and provide new ideas for the desigh of process flow. The compensation for convex corner is obtained creatively by applying the high density doping of boron and is applied to the fabrication of single crystal silicon microvalve. The model of the file of the micropum is presented as and elastic lamina with uniform thickness and clamped boundaries. The deformations of this lamina with different load such as uniform pressure, concentrated force and fluidic pressure at the condition of small deformation and large deformation are analyzed. The static and electrodynamic model of the PZT bimorph is presented and the relational matrix between input and output vectors is derived from the basic piezoelectric function. The deformation formula of the bimorph mounted at an elastic support is also obtained. From the Bernoulli equation, the structure-fluid coupling models of the microvalves are established. The losses of head are analyzed in allusion at these models. Then the features of microvalves are simulated and tested. To analyze the micropump faster and more precisely, the modeling method of equivalent circuit network are summarized. It is discussed how and equivalent network is built respectively and then connected with each other to form the whole equivalent circuit network. To control the flow direction efficiently, the microvalves are designed and fabricated, which are made of photosensitive polyimide (PSPI) and single crystal silicon. This is the first time that the polymer material is used as functional structure material of MEMS devices. The process parameters of PSPI are determined through experiments. The single crystal silicon flap of the microvalve and the film of micromump are fabricated by applying the etch-stop technique, and the thickness error of the film is less than 10%. The inlet and outlet microvalves are fabricated on the same chip so that the whole micropump has higher integration level. The maximum flow of PSPI microvalve is more than 20ml/min, and the load carrying capacity of backside is more than 500kPa without any leakage. The maximum flow of single crystal silicon microvalve is also more than 20ml/min, and its carrying capacity of backside is more than 50kPa with the leakage of around 20ul/min. the micropump is driven by a PZT bimorph that is mounted on the specially designed installer. The inlet and outlet are on the same side and the driving structure is on the other side. The pump film is also round. The features of the micropump are tested. The maximum flow of the bimorph-driven micropump is 365ul/min, and the backpressure is 2.38kPa. The precision of flow control is better than 1ul/min. At last, the main achievements and contributions of this dissertation are summarized.